On scheduling a photolithography area containing cluster tools
نویسندگان
چکیده
منابع مشابه
Scheduling Analysis of Time-Constrained Dual-Armed Cluster Tools
Cluster tools, each of which consists of several singlewafer processing chambers and a wafer handling robot, have been increasingly used for diverse wafer fabrication processes. Processes such as some low pressure chemical vapor deposition processes require strict timing control. Unless a wafer processed at a chamber for such a process leaves the chamber within a specified time limit, the wafer...
متن کاملOnline Scheduling on a CPU-GPU Cluster
We consider the online scheduling problem in a CPU-GPU cluster. In this problem there are two sets of processors, the CPU processors and GPU processors. Each job has two distinct processing times, one for the CPU processor and the other for the GPU processor. Once a job is released, a decision should be made immediately about which processor it should be assigned to. The goal is to minimize the...
متن کاملA dispatching rule for photolithography scheduling with an on-line rework strategy
Generally speaking, wafer fabrication factories define the photolithography area as the dispatching center of the entire factory. To establish a set of operative dispatching rules in the photolithography area while taking into consideration the rework of defective products would assist in coordinating and balancing the workload of the entire production line. Furthermore, it would help to enhanc...
متن کاملMultilayered Superlenses Containing CsBr or Active Medium for Subwavelength Photolithography
The characteristics of periodic multilayered near-field superlenses are analyzed and optimized, using the dispersion relation derived from an effective medium theory and the transfer function in the spectral domain. The k′ z-kx and k′′ z -kx contours are used to explain and predict the spectral width, amplitude and phase of the transfer function. Superlenses containing CsBr or active layers are...
متن کاملImplementation of Gang-Scheduling on Workstation Cluster
The goal of this paper is to determine how e ciently we can implement an adequate parallel programming environment on a workstation cluster without modifying the existing operating system. We have implemented a runtime environment for parallel programs and gang-scheduling on a workstation cluster. In this paper, we report the techniques used to implement gang-scheduling on a workstation cluster...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Computers & Industrial Engineering
سال: 2018
ISSN: 0360-8352
DOI: 10.1016/j.cie.2018.05.036